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Photolithography is the most common method for the semiconductor fabrication of integrated circuits ("ICs" or "chips"), such as solid-state memories and microprocessors. It can create extremely small patterns, down to a few nanometers in size. It provides precise control of the shape and size of the objects it creates.
Wavelengths of the visual spectrum, 380 to about 740 nanometers (nm). [1] Dips in intensity are observed as dark lines at the wavelengths of the Fraunhofer lines, (e.g., the features G, F, b, E, B). The Fraunhofer lines are a set of spectral absorption lines .
The small diagonal cylinder at the bottom of the arc tube is a resistor which supplies current to the starter electrode. A mercury-vapor lamp is a gas-discharge lamp that uses an electric arc through vaporized mercury to produce light. [ 1] The arc discharge is generally confined to a small fused quartz arc tube mounted within a larger soda ...
In the 1960s, visible light was used for the production of integrated circuits, with wavelengths as small as 435 nm (mercury "g line"). Later, ultraviolet (UV) light was used, at first with a wavelength of 365 nm (mercury "i line"), then with excimer wavelengths, first of 248 nm (krypton fluoride laser), then 193 nm (argon fluoride laser), which was called deep UV.
A spectral line is a weaker or stronger region in an otherwise uniform and continuous spectrum. It may result from emission or absorption of light in a narrow frequency range, compared with the nearby frequencies. Spectral lines are often used to identify atoms and molecules. These "fingerprints" can be compared to the previously collected ones ...
A stepper or wafer stepper is a device used in the manufacture of integrated circuits (ICs). It is an essential part of the process of photolithography, which creates millions of microscopic circuit elements on the surface of silicon wafers out of which chips are made. It is similar in operation to a slide projector or a photographic enlarger.
In physics and mathematics, wavelength or spatial period of a wave or periodic function is the distance over which the wave's shape repeats. [ 1][ 2] In other words, it is the distance between consecutive corresponding points of the same phase on the wave, such as two adjacent crests, troughs, or zero crossings.
Emission spectrum of a ceramic metal halide lamp. The emission spectrum of a chemical element or chemical compound is the spectrum of frequencies of electromagnetic radiation emitted due to electrons making a transition from a high energy state to a lower energy state. The photon energy of the emitted photons is equal to the energy difference ...